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Aluminum Oxide Thin Films from Aqueous Precursors

A patented aqueous synthesis route for making high quality alumina thin films of exceptional quality and smoothness Background Aluminum oxide has many desirable properties making it technologically important as a barrier coating, optical film, and as a dieletric thin-film component of electronic devices. The quality of the material varies with...

Published: 6/17/2024 | Inventor(s): Douglas Keszler, Wei Wang

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Category(s): Engineering