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Solution Deposition of Amorphous Zirconia Thin Films

Technology Description OSU researchers have developed methods of making amorphous zirconium and hafnium halogenides with aqueous solution processing. The resulting films are extremely smooth, nearly as dense as fully densified crystalline films, and have high optical transparency. The solution deposition process eliminates the need for processing under...

Published: 3/19/2024 | Inventor(s): James Sommers, Jennie Amador, Douglas Keszler

Keywords(s): alkali diffusion barrier, thin film, zirconia and hafnia thin films

Category(s): Chemical, Engineering, Materials Science, Nanoscience & Microtechnologies, Physical Science